Universal Solvent Circulation Heater

Allows Safe Heating of Volatile Silicon Wafer Cleaning Solvents

The Universal Solvent circulation heater from CAS consists of a cylindrical-shaped cast part with helical coiled tubes and formed tubular heating elements cast-in. Three Type J thermocouples sense the solvent inlet, solvent outlet and casting core temperatures. The Universal Solvent circulation heater operates at near 100 percent efficiency while reducing the risk of solvent contamination.

The Universal Solvent circulation heater provides a safe and efficient means of heating low flash point solvents. Both the heating elements and the solvent tube are cast into the aluminum. The heating elements provide heat to the aluminum mass and the mass transfers this heat to the tube carrying the solvent. The casting can also be surrounded by insulation to minimize heat loss and keep equipment cabinet temperatures low. A secondary chilled water tube is also cast-in. This tube quickly cools the casting for routine maintenance or lowers the solvent below the flash point.

Safety features of CAS’s Universal Solvent circulation heater include a NEMA 7 rated (explosion proof) enclosure box covering the electrical connections and a snap-action over temperature protection switch to provide safe shut down. The casting body is Teflon® coated to protect the aluminum in case of accidental contact with solvents.

The Universal Solvent circulation heater is appropriate for numerous applications and may be customized to meet specific customer needs.

Features and Benefits

Fluid path constructed independent from heater sheath

• Allows solvent to never be in contact with heater element
• Eliminates hot spots caused by poor flow or start up conditions

Cast aluminum construction

• Allows accurate process temperature control
• Provides rugged design and durability
• Higher reliability due to fewer components and nonwelded construction
• Ensures longer heater life

Electrical enclosure constructed for hazardous environments

• Reduces risk of accidental combustion of solvent vapors 316 SS passivated and electropolished solvent tube
• Provides material compatibility with most semiconductor solvents
• Ensures contamination resistant surface for heated solvent
• Assures higher reliability and cleanliness due to seamless tubing

Operates to 1500psi or greater with appropriate fittings

• Enables economic high pressure operation

Self draining construction

• Eliminates trapped material that may add contamination to the process
• Saves on operating time

Agency ratings

• UL®/CSA recognized heater elements
• NEMA 7 Class 1, Div. 1 and 2, Groups B, C and D
electrical enclosure

Applications

Semiconductor wet process OEMs

• Wafer cleaning equipment (wet bench systems)
• Post etch wet strip and photoresist removal applications
• Heating of low flash point solvents such as EKC, ACT and NMP

Specifications

Operating Temperatures

• Ambient to 392°F (200°C)

Electrical

• 208 to 240VÅ(ac) and 6000 to 8000W single-phase
• 208 to 480VÅ(ac) and 7500W three-phase

316L SS Seamless Tubes

• 0.75 in. (19 mm) O.D., solvent tube - passivated and electropolished
• 0.25 in. (6 mm) O.D., cooling water tube

Fitting Connections

• Flaretek® or Swagelok VCR fittings on solvent tube
• National Pipe Thread (NPT) or Swagelok VCR fittings on cooling tube

Optional Features

• Insulating jacket, max temperature 400°F (204°C)
• Contact your CAS representative for custom inquiries

Sensors/Switches

• 2 cast-in Type J thermocouples sense solvent tube inlet and outlet temperatures
• 1 replaceable Type J thermocouple senses casting core temperature
• Mechanical snap action switches for over temperature protection

Casting Dimensions

• Height 8.5 in. (216 mm)
• Diameter 5.75 in. (146 mm)
• Dimensions above do not include tube fittings and mounting bosses

Enclosure Dimensions

• Enclosure rated for Class 1, Div. 1 and 2, Groups B, C and D
• Height 5 in. (127 mm)
Diameter 4.75 in. (121 mm)

Teflon® Coated Casting/Anodized Electrical Enclosure

• Protects unit from accidental contact with corrosive process solvents

Flaretek® is a registered trademark of Entegris, Inc.
Teflon® is a registered trademark of E.I. du Pont de Nemours & Company.